Katson VLSI Technology, Design & Basics of Microelectronics by R.K. Singh

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Katson VLSI Technology, Design & Basics of Microelectronics by R.K. Singh

Content

  • Introduction to VLSI Technology
  • Film Deposition
  • Epitaxy Process
  • Diffusion Process
  • Ion Implantation
  • Lithography
  • Photoresist and Etching
  • MOSFET and MOS Fabrication Technology
  • Simulation Process (IC Fabrication Steps)
  • Bipolar IC Technology
  • Appendices
  • Examination Paper


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